THE EFFECT OF SPIN COATING SPEED AND DEPOSITION PARAMETERS ON THE CRYSTALLINE SIZE OF ZnO THIN FILMS
DIYALA JOURNAL OF ENGINEERING SCIENCES,
2013, Volume 6, Issue 4, Pages 100-106
AbstractZnO thin films have been deposited onto the glass-substrates by the sol-gel spin coating method at different chuck rotation rates. This method was used for the preparation of thin films on the important semiconductors ІІ-VІ. The effect of deposition parameters on the structural, optical and electrical properties of the ZnO thin film was investigated. Zinc acetate dehydrate, 2- methoxethanol and monoethanolamine (MEA) were used as a starting material, solvent and stabilizer, respectively. XRD of the dried gel showed that weight loss continued until 300°C, with smallest particle size at 400 rpm spin coating speed.
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